Medium & Large Dry Vacuum Pumps
Agilent/PVR DRY Series Claw Vacuum Pumps
Claw type pumps from the DRY series have been designed for those applications where the handled medium must remain contaminant free during the process. The absence of wear parts in these pumps offers considerable savings in maintenance and associated down time.
Edwards iXL Dry Pumps
The iXL120 is a compact, low energy, 110 m3/h dry pump for wafer handling and other clean duty applications. It provides fast pump down of load lock chambers with extremely low energy consumption.
The iXL120 is one of the smallest and lightest pumps available for load lock and clean applications. Its low vibration and low noise levels make it ideal for mounting on-tool or within a fab’s waffle floor, helping to save valuable fab floor space. A Green Mode allows reduced utilities usage during idle periods, lowering utility costs and helping to save the environment.
Edwards GXS Dry Pumps
Edwards, the pioneer in dry pumping technology, launched the new generation of GXS dry vacuum pumps for industrial applications.
Edwards GXS range incorporates our unique screw technology with a world leading high efficiency drive to achieve excellent vacuum performance and low running costs. With advanced temperature control, low maintenance and long service intervals, the GXS is the most robust and economical vacuum pump that establishes a new standard in dry pumping.
Edwards Drystar 80 Pumps
Edwards Drystar 80 dry vacuum pump is configured for ease of installation and commissioning while providing a clean, robust and cost effective alternative to traditional oil-sealed pumps.
The Drystar 80 is designed to handle large volumes of condensable vapours and particulate loads to provide a consistent pumping performance, minimal service intervention and low cost of ownership. The use of dry pumping technology and unique seal design will eliminate contamination throughout the vacuum process making the Drystar 80 suitable for a range of applications and environments.
Edwards IDX Dry Screw pumps
The Edwards IDX dry pumps use the latest screw technology to provide a clean, effluent free vacuum. These pumps offer the ability to handle large volumes of dust and water vapor without any loss of performance while minimizing maintenance requirements and running costs. The IDX dry pumps are capable of continually operating from atmosphere to ultimate
Edwards iGX Dry Pumps
The Edwards iGX Dry Pumps provide a versatile vacuum pump platform with reliable performance for clean to medium-duty silicon and compound semiconductor applications. Compact size and low vibration allow great flexibility as iGX pumps can be used for on-tool, proximity or remote installations - in turn, ensuring space savings and ultimately reduced overall cost of ownership. The iGX pumps also offer Ethernet connectivity and other networking options.
Edwards GX Dry Pumps
The Edwards GX Dry Vacuum Pump sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range. GX dry pumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability
Edwards iH Dry Pumps
The Edwards iH dry pumps offer a highly reliable, low cost pump for difficult processes where particulate, condensable or corrosive by-products are present. The iH series has a five stage base pump with an innovative cantilever rotor, claw and roots design which improves dust handling and reduces exhaust noise. In addition, iH series pumps are fitted with a single stage mechanical booster pump and totally enclosed water cooled motors
Edwards EPX on-tool High Vacuum Pumps
The Edwards EPX high vacuum dry pumps offer on-tool pumping in a lighter and smaller package, requiring only 1.4 kW of power. Using a unique, patented, single-shaft regenerative/Holweck stage mechanism, EPX series pumps are capable of pumping from atmosphere to ultimate pressures with no risk of process contamination.